{"id":571,"date":"2022-04-21T11:05:25","date_gmt":"2022-04-21T02:05:25","guid":{"rendered":"http:\/\/photon21.co.kr\/eng\/?page_id=571"},"modified":"2022-04-21T16:23:33","modified_gmt":"2022-04-21T07:23:33","slug":"post-cmp-cleaner","status":"publish","type":"page","link":"http:\/\/photon21.co.kr\/eng\/post-cmp-cleaner\/","title":{"rendered":"Post CMP Cleaner"},"content":{"rendered":"

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BUSINESS<\/p>\n

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Semiconductor<\/p>\n

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Display<\/p>\n

[\/et_pb_text][\/et_pb_column][et_pb_column type=”1_4″ _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.16.1″ _module_preset=”default” text_text_color=”#FFFFFF” text_font_size=”20px” text_orientation=”center” custom_padding=”20px||20px||true|false” link_option_url=”\/eng\/oled-evaporation\/” global_colors_info=”{}”]<\/p>\n

Vacuum system<\/p>\n

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Heating system<\/p>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=”1″ _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][et_pb_row _builder_version=”4.16.1″ _module_preset=”default” custom_padding=”0px||0px|||” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.16.1″ _module_preset=”default” text_font=”|600|||||||” text_text_color=”#ba000f” text_font_size=”1.8em” text_orientation=”center” global_colors_info=”{}”]<\/p>\n

Semiconductor<\/p>\n

[\/et_pb_text][et_pb_divider color=”#ba000f” _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][\/et_pb_divider][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][et_pb_column type=”4_4″ _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.16.1″ _module_preset=”default” hover_enabled=”0″ global_colors_info=”{}” sticky_enabled=”0″]<\/p>\n

\n
Single Wet Cleaner<\/a><\/div>\n
Post CMP Cleaner<\/a><\/div>\n
Wafer Sorter<\/a><\/div>\n<\/div>\n

[\/et_pb_text][\/et_pb_column][\/et_pb_row][et_pb_row column_structure=”2_5,3_5″ _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][et_pb_column type=”2_5″ _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][\/et_pb_column][et_pb_column type=”3_5″ _builder_version=”4.16.1″ _module_preset=”default” global_colors_info=”{}”][et_pb_text _builder_version=”4.16.1″ _module_preset=”default” text_text_color=”#000000″ global_colors_info=”{}”]<\/p>\n

After wafer CMP process, this system is used to remove the surface and back of the wafer with the use of a brush and cleansing solution. <\/p>\n

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Feature<\/p>\n

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    \n
  • Single Wet Cleaner for Post CMP<\/li>\n<\/ul>\n

    – Spin Dry after the removal of impurities by PVA brush<\/p>\n

    [\/et_pb_text][et_pb_text _builder_version=”4.16.1″ _module_preset=”default” text_text_color=”#000000″ global_colors_info=”{}”]<\/p>\n

      \n
    • Customized components<\/li>\n<\/ul>\n

      – Various kinds of components (e.g., 2 brushing chambers + 2 Spin Dry chambers)<\/p>\n

      – A variety of options, such as Megasonic and Spray<\/p>\n

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      Specifications<\/p>\n

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        \n
      • Chamber quantity : selected by a customer<\/li>\n
      • Process : Post CMP Cleaning<\/li>\n
      • Wafer size : 200mm, 300mm (Making a special type of wafer is available.)<\/li>\n<\/ul>\n

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        BUSINESSSemiconductorDisplayVacuum systemHeating systemSemiconductor Single Wet Cleaner Post CMP Cleaner Wafer Sorter After wafer CMP process, this system is used to remove the surface and back of the wafer with the use of a brush and cleansing solution. Feature Single Wet Cleaner for Post CMP – Spin Dry after the removal of impurities by PVA brush […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":""},"_links":{"self":[{"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/pages\/571"}],"collection":[{"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/comments?post=571"}],"version-history":[{"count":4,"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/pages\/571\/revisions"}],"predecessor-version":[{"id":664,"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/pages\/571\/revisions\/664"}],"wp:attachment":[{"href":"http:\/\/photon21.co.kr\/eng\/wp-json\/wp\/v2\/media?parent=571"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}