Semiconductor
Display
Vacuum system
Heating system
Vacuum system
This system is used to deposit OLED organic or inorganic matters in boards by vacuuming and heating organic or inorganic matters in OLED deposition process.
Feature
- HIGH-VACUUM EQUIPMENT : 1 x 10-7 torr
- Point, Linear Source
- Provide necessary Data and convenient UI component for production management
Specifications
- Working pressure : 1 x 10-7 Torr
- Uniformity : ≤ 2%
- Target : OLED