This system is the equipment to control Susceptor precisely. It is the 2-Zone precision control system in consideration of the characteristics of Susceptor.
- Sensor (16Ch) for a massive amount of measurement and Data Logger for measuring and saving temperature data
- Embedded PC & Monitor for convenience improvement
- Response to a variety of upper interfaces
- Chanel : 2
- Control capacity : ~5Kw X 2-Zone
- Control : Embedded PC & Monitior 적용, Ethernet, RS-232C, RS-485