Descriptive Element
Certification
Patent
Descriptive Element
Semiconductor Cleaning Equipment
- Robot system causing no particles
- High-precision and high-speed board transfer system
- High-precision chemical spray system
- Chemical concentration/temperature control system
- High-purity current control chamber system
- Electrics and software technology
- Cleaning optimization technology
- System integration technology
※ 6 patents registered
Grinding equipment
- High-precision gantry robot system
- Precise board transfer system
- High-speed rotation spindle system
- Camera vision inspection system
- Grinder electrics & software technology
- Board loading & transfer technology
- OLED In-line equipment
※ 3 patents registered
Element Parts
- Ultra thin aluminum susceptor
- Uniform temperature distribution control
- High-speed temperature control system
- High-vacuum and high-temperature chamber (OLED)
- Vacuum distribution system
- Carbon nanotube heater
- Carbon nanotube thin film technology
※ 12 patents registered
