This system is used to deposit OLED organic or inorganic matters in boards by vacuuming and heating organic or inorganic matters in OLED deposition process.
- HIGH-VACUUM EQUIPMENT : 1 x 10-7 torr
- Point, Linear Source
- Provide necessary Data and convenient UI component for production management
- Working pressure : 1 x 10-7 Torr
- Uniformity : ≤ 2%
- Target : OLED