Semiconductor
Display
Vacuum system
Heating system
Vacuum system
![그림19](http://photon21.co.kr/eng/wp-content/uploads/sites/2/2022/04/그림19.png)
This system is used to deposit OLED organic or inorganic matters in boards by vacuuming and heating organic or inorganic matters in OLED deposition process.
Feature
- HIGH-VACUUM EQUIPMENT : 1 x 10-7 torr
- Point, Linear Source
- Provide necessary Data and convenient UI component for production management
Specifications
- Working pressure : 1 x 10-7 Torr
- Uniformity : ≤ 2%
- Target : OLED