BUSINESS

Semiconductor

Display

Vacuum system

Heating system

Heating system

As one of display panel production equipment, this system is the vacuum large-area plate heater for thermal process

Feature

  • Minimization of a change in the heater surface in case of high temperature rise
  • Heater line durability enhancement through thermal expansion/contraction
  • Weld zone leak-free

Specifications

  • Usual Temperature : 250℃~450℃,
  • Heater Size : 5.5G~8G
  • Control Zone : 7-Zone