Semiconductor
Display
Vacuum system
Heating system
Vacuum system
This equipment is used to vacuum the cells loaded in Load Chamber under atmospheric pressure condition by using Index Robot, and then to transfer the cells to Vacuum Process Module through Vacuum Robot.
Feature
- The simulation based design and making to minimize a change in the internal and external pressure
- Out-gassing minimization technology
- Efficient pressure control to shorten the time of board transfer between vacuum chambers
Specifications
- Working pressure : 1 x 10-3 Torr
- Cell Size : Gen2 ~ Gen6 Glass
- Target : OLED, LCD