This system rotates a semiconductor wafer one by one and sprays a variety of cleaning solutions in order to remove pollutants on the surface and back of the wafer.

Feature

• Smallest Footprint

– A process chamber has a compact size, so that it can installed in 1F to 4F. It has the smallest footprint in the world.

• Highest Throughput

– The wafer processing throughput per footprint is the highest in the world.

– Wafer transfer system optimization and 4-hand robot for smooth large-capacity process

Specifications